Epitaxial Piezoelectric Pb() Thin Films on Silicon for Energy Harvesting Devices
Figure 7
Optical image of an epi-PZT cantilever (1000 × 2500 × 7 μm3) with a Si proof mass (1000 × 500 × 230 μm3). The inset shows the Si proof mass on the back side of the cantilever. The effective volume of the final device is 0.1325 mm3.
