Synthesis and Characterization of Pb(Zr𝟎.𝟓𝟑, Ti𝟎.𝟒𝟕)O𝟑-Pb(Nb𝟏/𝟑, Zn𝟐/𝟑)O𝟑 Thin Film Cantilevers for Energy Harvesting Applications

Figure 2

Schematics showing the cross-section of the PZT-PZN thin film stack subjected to the 4-step photolithography process, (a) metal deposition (50 nm Cr/500 nm Au), (b) PECVD SiO₂ encapsulation, (c) deposition of 50 nm Cr/500 nm Au for packaging-bonding, and (d) release step. The cantilever is operating in the d₃₃ mode.

(a)

(b)

(c)

(d)