Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications

Table 2

Geometrics of the energy harvesters.

Beam model	Length; () in mm	Length of the mass () in mm	Beam; width () in µm	Thickness of the piezoelectric; layer () in µm	Thickness of the silicon; layer () in µm	Natural; frequency in Hz
PEH-A	20	15	1000	45	50	10.94
PEH-B	20	15	2000	45	50	15.89
PEH-C	20	15	3000	45	50	19.55
PEH-D	20	15	5000	45	50	25.57
PEH-E	20	15	7000	45	50	30.57