Abstract

The past decade has seen some remarkable progress in spatially resolved texture analysis due to new computer-aided techniques of electron diffraction with the SEM and TEM. To avoid, however, some limitations specific for electron microscopy, an x-ray scanning apparatus has been developed for the mapping of texture and element distributions on bulk samples. The set-up consists of a “white” x-ray source, a collimator system to produce a fine primary beam spot, an x-y sample stage operated by stepper motors, and an EDX detecting system for peak separation.Energy dispersive x-ray diffraction and x-ray fluorescence analysis are used for data acquisition. The density distributions of selected crystallographic directions or of element concentrations in the sample surface are acquired spot by spot, and represented by pseudocolour or grey shade maps. Several texture distribution as well as element composition maps can be obtained simultaneously. Spatial resolution is presently limited to 50 μm by the low level of primary beam intensity.