Table of Contents Author Guidelines Submit a Manuscript
VLSI Design
Volume 6 (1998), Issue 1-4, Pages 373-378
http://dx.doi.org/10.1155/1998/15828

Moving Adaptive Unstructured 3-D Meshes in Semiconductor Process Modeling Applications

Los Alamos National Laboratory, Lucent Bell Laboratories, USA

Copyright © 1998 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Andrew Kuprat, Denise George, Eldon Linnebur, Harold Trease, and R. Kent Smith, “Moving Adaptive Unstructured 3-D Meshes in Semiconductor Process Modeling Applications,” VLSI Design, vol. 6, no. 1-4, pp. 373-378, 1998. doi:10.1155/1998/15828