Table of Contents
X-Ray Optics and Instrumentation
Volume 2008 (2008), Article ID 792540, 9 pages
http://dx.doi.org/10.1155/2008/792540
Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

1Nano-Science Center, University of Copenhagen, The H. C. Ørsted Institute, Universitetsparken 5, 2100 Copenhagen, Denmark
2Danish National Space Center, Juliane Maries Vej 30, 2100 Copenhagen, Denmark
3Niels Bohr Institute, University of Copenhagen, The H. C. Ørsted Institute, Universitetsparken 5, 2100 Copenhagen, Denmark

Received 14 February 2008; Accepted 13 May 2008

Academic Editor: Scott Rohrbach

Copyright © 2008 Anette Vickery et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.