Collimated Magnetron Sputter Deposition for Mirror Coatings
(a) Two separator plates and one
curved substrate. The width of the separator plate (S in the sketch below) is
50 mm. (b) For clarity, in this side-view sketch, the chimney around the target has been
left out. The dimensions of the sputtering chamber limits the maximum width of
the separator plates to S = 62 mm.
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