X-Ray Optics and Instrumentation / 2008 / Article / Fig 2

Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 2

(a) Two separator plates and one curved substrate. The width of the separator plate (S in the sketch below) is 50 mm. (b) For clarity, in this side-view sketch, the chimney around the target has been left out. The dimensions of the sputtering chamber limits the maximum width of the separator plates to S = 62 mm.
792540.fig.002a
(a)
792540.fig.002b
(b)