X-Ray Optics and Instrumentation / 2008 / Article / Fig 3

Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 3

Data from specular reflectivity measurements of multilayers comprised of 10 bilayers of W/Si. The substrates are commercially available Si wafers with an rms roughness of about 2.75 Å. For 4 different pressures of Ar, the viewgraphs show (a) and (b) the thickness of Si and W versus the opening angle . (c) The fraction of Si versus the opening angle . (d) The rms roughness versus the opening angle .