Collimated Magnetron Sputter Deposition for Mirror Coatings
(Left) Sketch of the honeycomb mesh. (a) A
top view of the coating geometry. Here, the flat substrate is mounted on a
wedge defined by the angle .
The wedges are designed so the distance between the target and substrate center
is independent of the value of . (b) A
side-view sketch of the coating geometry with .