Collimated Magnetron Sputter Deposition for Mirror Coatings

<table>(Left) Sketch of the honeycomb mesh. (a) A
top view of the coating geometry. Here, the flat substrate is mounted on a
wedge defined by the angle <span class="inline" id="M29"></span>.
The wedges are designed so the distance between the target and substrate center
is independent of the value of <span class="inline" id="M30"></span>. (b) A
side-view sketch of the coating geometry with <span class="inline" id="M31"></span>.</table>

X-Ray Optics and Instrumentation

fig4

Figure 4

Figure 4: Collimated Magnetron Sputter Deposition for Mirror Coatings 