X-Ray Optics and Instrumentation / 2008 / Article / Fig 4

Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 4

(Left) Sketch of the honeycomb mesh. (a) A top view of the coating geometry. Here, the flat substrate is mounted on a wedge defined by the angle . The wedges are designed so the distance between the target and substrate center is independent of the value of . (b) A side-view sketch of the coating geometry with .

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