X-Ray Optics and Instrumentation / 2008 / Article / Fig 9

Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 9

(a) The coating rate increases with the total solid angle. The black square data points indicate the coating rate versus the solid angle (lower -axis), and the black dashed line is a linear fit assuming that in (5). The red circles show the coating rate versus the sum over theta of (5) with (upper -axis). (b) The goodness of the linear fits (GOF) of the coating rate to (5) versus the parameter . The dashed line indicates GOF for . The red circle marks the maximum of GOF corresponding to the value .

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