Collimated Magnetron Sputter Deposition for Mirror Coatings
coating rate increases with the total solid angle. The black square data points
indicate the coating rate versus the solid angle (lower -axis), and the black dashed
line is a linear fit assuming that in (5). The red circles show the coating rate
versus the sum over theta of (5) with (upper -axis). (b) The goodness of the linear fits (GOF) of the coating rate to (5) versus the
The dashed line indicates GOF for .
The red circle marks the maximum of GOF corresponding to the value .