Applications of Compact Laser-Driven EUV/XUV Plasma Sources
Figure 4
(a): Depths of EUV-generated ablation profiles in fused silica as a function of EUV pulse number for selected energy densities; (b): resulting ablation rates as a function of the applied EUV energy density ; the solid line represents the fit curve according to an ablation rate ( absorption coefficient, threshold energy density); inset: AFM image of fused silica, irradiated with 5 pulses at highest intensity ().
