Table of Contents
X-Ray Optics and Instrumentation
Volume 2010, Article ID 824387, 6 pages
http://dx.doi.org/10.1155/2010/824387
Research Article

Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region

1Japan Synchrotron Radiation Research Insitute (JASRI)/SPring-8, Sayo Hyogo 679-5198, Japan
2NTT-AT Nanofabrication Corporation, Atsugi, Kanagawa 243-0018, Japan

Received 29 October 2009; Accepted 17 June 2010

Academic Editor: Ali Khounsary

Copyright © 2010 Yoshio Suzuki et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

A Fresnel zone plate (FZP) with 35 nm outermost zone width has been fabricated and tested in the hard X-ray region. The FZP was made by electron beam lithography and reactive ion etching technique. The performance test of the FZP was carried out by measuring the focused beam profile for coherent hard X-ray beam at the beamline 20XU of SPring-8. The full width at half maximum of the focused beam profile measured by knife-edge scan method is 34.9±2.7 nm, that agrees well with the theoretical value of diffraction-limited resolution. Applications to scanning microscopy were also carried out.