Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition

Table 2

Structural and electronic parameters extracted from SE analysis of the five different samples.

ALD cycle				/eV	/eV	/nm	/nm
100	1.66	118.24	644.70	74.33	3.08	11.62	0.08	0.68
200	1.39	156.83	393.56	70.30	2.99	19.63	0.25	0.67
300	1.22	72.65	39.07	25.23	2.98	30.95	0.89	0.58
400	0.59	334.78	430.62	92.86	2.92	39.05	0.15	0.53
500	1.11	207.70	295.86	59.76	2.92	50.40	0.21	0.73