Research Article
Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition
Table 2
Structural and electronic parameters extracted from SE analysis of the five different samples.
| ALD cycle | | | | /eV | /eV | /nm | /nm | |
| 100 | 1.66 | 118.24 | 644.70 | 74.33 | 3.08 | 11.62 | 0.08 | 0.68 | 200 | 1.39 | 156.83 | 393.56 | 70.30 | 2.99 | 19.63 | 0.25 | 0.67 | 300 | 1.22 | 72.65 | 39.07 | 25.23 | 2.98 | 30.95 | 0.89 | 0.58 | 400 | 0.59 | 334.78 | 430.62 | 92.86 | 2.92 | 39.05 | 0.15 | 0.53 | 500 | 1.11 | 207.70 | 295.86 | 59.76 | 2.92 | 50.40 | 0.21 | 0.73 |
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