PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells

<table>External quantum efficiency, IQE and reflection values for the solar cell using PECVD-ONO rear passivation. Experimental data (symbols) and calculated values (lines) are displayed. The calculation was done using PC1D [<a href="/journals/aoe/2008/485467/#B1">1</a>].</table>

Advances in OptoElectronics

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Figure 14

Figure 14: PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells 