A High Rigidity and Precision Scanning Tunneling Microscope with Decoupled and Scans

Figure 2

(a) Scan unit model for finite element analysis. (b) Model with mesh for finite element analysis. (c) Radial vibration model (fixed at the bottom) and the corresponding stress pattern. (d) Axial vibration model (fixed at the bottom) and the corresponding stress pattern.

(a)

(b)

(c)

(d)