A High Rigidity and Precision Scanning Tunneling Microscope with Decoupled and Scans

Table 1

Material properties for finite element analysis.

	Young’s modulus (10^10 N/m^2)	Density (g/cm^3)	Poisson ratio
Piezoceramics	6.3	7.45	0.31
Tantalum	36	16.69	0.34
Sapphire	68.5	4.00	0.28