MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring

Figure 7

Iterative solution of lift-off voltage in ConventorWare: (a) 6 v; (b) 3 v; (c) 4.5 v; (d) 3.75 v; (e) 3.375 v; (f) 3.1875 v.