Research Article
MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring
Table 1
Multilayer microbeam parameters.
| Type | Symbol | Data |
| Length | L | 600 | Width | | 40 | Thickness | H | 2.4 | Young modulus | E | 150 GPa | Air viscosity | U | 1.82 10−5 kg/(m s) | Residual stress | S | −3.7 MPa | Density | | 2330 kg/m3 | Air pressure | P0 | 1.013 105 pa |
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