A SVR Learning Based Sensor Placement Approach for Nonlinear Spatially Distributed Systems

Figure 10

Control performance comparisons with different sensor placement schemes: (a1)–(a3) using proposed sensor locations (six optimal locations); (b1)–(b3) using nine evenly distributed sensor locations. (1) denotes wafer temperature evolution profile, (2) denotes three input signals, and (3) denotes wafer temperature under steady state, where may be (a) or (b).