Ellipsometric Characterization of Thin Films from Multicomponent Chalcogenide Glasses for Application in Modern Optical Devices

Table 1

Optical parameters (refractive index, 𝑛, and thickness, 𝑑) of thin films from As-S-Bi (Tl, In) systems, determined by ellipsometric and Swanepoel’s spectrophotometric methods at 𝜆=632.8 nm. The composition of the thin films determined by X-ray microanalysis is given in parentheses.

	Spectrophotometric		Ellipsometric
Composition of thin film			Multiple-angle calculation		Single-angle calculation
	d unexp [nm]	n unexp	d unexp [nm]	n unexp	n unexp (45°)	n unexp (50°)	n unexp (55°)
As28S72	977	2.35	978	2.347	2.353	2.352	2.351
(As28.5S71.5)
As40S60	943	2.46	937	2.457	2.452	2.457	2.454
(As40.7S59.3)
As45S55	898	2.45	897	2.449	2.451	2.448	2454
(As43.3S56.7)
GeS2	987	2.16	970	2.172	2.167	2.163	2.168
(Ge35.1S64.9)
As10Ge30S60	1217	2.34	1208	2.360	2.362	2.353	2.346
(As10.7Ge32.9S56.4)
As40S30Se30	996	2.72	997	2.722	2.719	2.719	2.722
(As39S32Se29)
Ge32S64Ga4	905	2.25	871	2.236	2.215	2.321	2.346
(Ge39.6S58.6Ga1.6)
Ge32S64In4	1270	2.27	970	2.220	2,086	2,215	2,299
(Ge38.5S60.1In1.4)
Ge32S64Tl4	1388	2.26	1408	2.204	2.235	2.389	2.447
Ge33.3S65.0Tl1.7
Ge28S66Bi6	1390	2.19	1291	2.256	2.161	2.264	2.255
(Ge31.4S65.9Bi2.7)
As39S58Bi3	1014	2.29	1122	2.367	2.493	2.477	2.467
(As46.9S52.0Bi1.1)
As38S56Bi6	1201	2.49	996	2.789	2.805	2.751	2.694
(As45.0S51.7Bi2.3)
As38S56Tl6	1117	2.64	930	2.712	2.690	2.718	2.721
(As43.6S54.0Tl2.4)
As2S3/Bi	1065	2.64	1067	2.632	2.639	2.632	2.627
(As41.3S53.5Bi5.2)
As2S3/Tl	1341	2.499	1342	2.492	2.493	2.495	2.496
(As43.5S54.5Tl2.0)
As2S3/In2S3	805	2.53	800	2.528	2.524	2.528	2.527
(As31.1S60.7In8.2)