Study of Structure and Electro-Optical Characteristics of Indium Tin Oxide Thin Films

Table 1

Structural parameters of as-deposited and annealed ITO thin films.

Parameter	As-deposited	Annealed
		300°C	600°C
𝑎𝑜 (Å)	10.127	10.123	10.119
𝑉 (Å^3)	1039.586	1037.356	1036.127
Δ𝑑/𝑑𝑜 (%)	1.19	0.92	0.72
CS (nm)	48	53	62