Characterization of WO₃ Thin Films Grown on Silicon by HFMOD

Table 1

Raman bands for monoclinic and triclinic phases of WO₃ and their assignments.

Monoclinic wavenumber (cm^−1)	Triclinic wavenumber (cm^−1)	Raman groups and assignments
60	63	W–W
65	75	W–W
80	84	W–W
—	96	W–W
126	138	W–W
269	276	𝜈(O–W–O)
322	331	𝛿(O–W–O)
710	721	𝜈(W2O6 & W3O8)
801	812	𝜈(W–O–W)