Table 1: Argon pressure dependence of 2θ values for (002) peaks, crystallite sizes, and deposition rate.

  
(Pa)
2θ (002) peakCrystallite size (nm)Deposition rate (Å/min)
200°C500°C200°C500°C

2.6734.3834.4111.714.0330
5.3334.3334.4512.614.4260
8.0034.3834.4412.214.6130
10.6634.4034.4211.513.8110