Table 2: Resistivity values as a function of for films annealed at 200 and 500°C.

(Pa)Resistivity (Ω cm) at 302 K
200°C500°C

2.673.7 × 1031.8 × 10−1
5.335.9 × 1044.3 × 10−1
8.006.2 × 1048.5 × 10−1
10.661.1 × 1062.4 × 101