Research Article

High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN Superlattice Structure

Figure 1

(a) The annealing temperature and (b) annealing time dependence of the conductivity of Mg-doped AlGaN p-type sample annealed by RTA.
784918.fig.001a
(a)
784918.fig.001b
(b)