High Conductivity of Mg-Doped Al<sub>0.3</sub>Ga<sub>0.7</sub>N with Al<sub>0.4</sub>Ga<sub>0.6</sub>N/AlN Superlattice Structure

<table>FWHM of (0002) and (10<svg height="15.1625" id="M4" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 8.2875004 15.1625" width="8.2875004" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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<g transform="matrix(.017,-0,0,-.017,.062,15.1)"><path d="M384 0h-275v27q67 5 81.5 18.5t14.5 68.5v385q0 38 -7.5 47.5t-40.5 10.5l-48 2v24q85 15 178 52v-521q0 -55 14.5 -68.5t82.5 -18.5v-27z" id="x31"></path></g>
</svg>2) XRD rocking curve at different annealing temperature for 5 min in N<sub>2</sub>.</table>

Advances in Condensed Matter Physics

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Figure 3

Figure 3: High Conductivity of Mg-Doped Al<sub>0.3</sub>Ga<sub>0.7</sub>N with Al<sub>0.4</sub>Ga<sub>0.6</sub>N/AlN Superlattice Structure 

Advances in Condensed Matter Physics

High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN Superlattice Structure

Figure 3

High Conductivity of Mg-Doped Al_0.3Ga_0.7N with Al_0.4Ga_0.6N/AlN Superlattice Structure