High Conductivity of Mg-Doped Al<sub>0.3</sub>Ga<sub>0.7</sub>N with Al<sub>0.4</sub>Ga<sub>0.6</sub>N/AlN Superlattice Structure

<table>(a) Mg and (b) H SIMS depth profiles before and after 850°C annealing in N<sub>2</sub>.</table>

Advances in Condensed Matter Physics

Figure 4: High Conductivity of Mg-Doped Al<sub>0.3</sub>Ga<sub>0.7</sub>N with Al<sub>0.4</sub>Ga<sub>0.6</sub>N/AlN Superlattice Structure 