Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications

Figure 4

versus length of the resistor ((a) and (c)) and square of versus the inversed width of the resistor ((b) and (d)) (color online). (a) and (b) come from lightly doped resistors while (c) and (d) come from highly doped ones.

(a) Low doping

(b) Low doping

(c) High doping

(d) High doping