Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Figure 7

Optical dispersion of refractive index (lines) and light absorption (dash line) in TiONx films of different thickness (different nitridation time) according to the data of Figure 5 for (a) sample number 1, (b) sample number 2, and (c) sample number 3a.

(a)

(b)

(c)