Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Table 1

Calculation results for one-layer structure.

, Å	()
50	1.6275 − 3.6481
90	2.1491 − 2.1822
100
110	2.6164 − 1.8500
150	2.9908 − 1.4533
300	3.7628 − 1.0180
1000	4.0495 − 1.4444