Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Table 2

Calculation results for two-layered structure.

, Å	, Å
50	50
50	20	2.5 − 2	1.0271 − 4.1815
50	20	2.2776 − 2.7318	1.5291 − 2.5012
50	20	1.7903 − 3.1159	2.9627 − 2.0428
50	150	2.5 − 2	3.6502 − 1.2975
50	150	1.9293 − 0.2837	3.3544 − 1.5333
50	100	2.9989 − 1.1472	2.7523 − 1.8887