Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Table 3

Calculation results for three-layered structure.

, Å	, Å	, Å
30	30	40
30	20	20	2.5 − 2i	1.8058 − 4.0108	1.7848 − 2.1868
30	50	20	2.4034 − 3.9591	3.2192 − 1.2237	2.7586 − 1.1836
30	20	50	2.6243 − 3.7342	3.2267 − 1.2572	2.7594 − 1.1830
30	100	100	1.8556 − 2.4132	2.4437 − 0.2124	3.9365 − 2.1136