Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers

Table 5

The data of spectral ellipsometry for three-layered structure.

, Å	, Å	, Å
100	200	300	1.5 − 0.2	2.0 − 0.8	2.5 − 2
133	144	320	1.8983	1.6534 − 0.6166	2.5041 − 2.0016