High-Electron-Mobility SiGe on Sapphire Substrate for Fast Chipsets

Figure 5

Etch-pit test results of (a) typical SiGe on Si(100) wafer with Ge content = 35% and of (b) rhombohedral SiGe on -plane sapphire with Ge content = 35% (c) threading dislocation etch-pit density of on sapphire substrate based on the Ge content.

(a)

(b)

(c)