The Investigation of Field Plate Design in 500 V High Voltage NLDMOS

<div>Breakdown voltage related to MFP3 extension over PFP2 (<svg height="9.04777pt" id="M32" style="vertical-align:-0.04981995pt" version="1.1" viewbox="-0.0498162 -8.99795 15.0041 9.04777" width="15.0041pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M593 650H142L136 622C219 616 224 611 209 531L130 120C114 39 108 34 23 28L17 0H501C518 32 557 130 568 158L540 169C519 132 495 93 469 70C439 43 409 35 332 35C272 35 241 37 225 50C211 61 211 89 222 149L253 320H350C441 320 443 312 441 239H471L510 434H481C455 366 448 358 360 358H260L303 572C311 613 312 615 348 615H431C509 615 522 603 532 581C544 555 546 531 545 491L574 493C583 555 592 631 593 650Z" id="g113-70"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="616" vert-adv-y="616"></glyph.data></g><g transform="matrix(.0135,0,0,-0.0135,8.346,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z" id="g113-50"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g></svg>) for different PFP2 sizes.</div>

Advances in Condensed Matter Physics

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Figure 8

Figure 8: The Investigation of Field Plate Design in 500 V High Voltage NLDMOS 