The Investigation of Field Plate Design in 500 V High Voltage NLDMOS

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td align="left">Item</td><td align="center">Reference</td><td align="center">This work</td><td align="center">Difference</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td align="left">Length of drift region (<i>μ</i>m)</td><td align="center">67</td><td align="center">37</td><td align="center">45%</td></tr><tr><td align="left"><svg height="12.3115pt" id="M38" style="vertical-align:-3.31355pt" version="1.1" viewbox="-0.0498162 -8.99795 20.8235 12.3115" width="20.8235pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z" id="g113-87"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="709" vert-adv-y="709"></glyph.data></g><g transform="matrix(.0095,0,0,-0.0095,7.641,3.264)"><path d="M372 352C427 368 507 407 507 502C507 548 486 592 451 616C420 638 376 650 301 650H44V622C124 616 128 610 128 527V123C128 40 122 34 36 28V0H257C336 0 402 12 453 40C512 72 548 124 548 191C548 291 471 335 372 350V352ZM213 362V558C213 591 216 602 226 608C235 614 258 618 282 618C377 618 415 558 415 490C415 406 369 362 260 362H213ZM213 328H258C380 328 450 283 450 181C450 76 377 35 296 34C231 34 213 53 213 125V328Z" id="g190-67"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="588" vert-adv-y="588"></glyph.data></g><g transform="matrix(.0095,0,0,-0.0095,13.18,3.264)"><path d="M43 650V622C120 616 128 612 128 526V124C128 39 120 33 34 27V0H270C392 0 492 25 567 83C643 141 690 230 690 350C690 444 655 517 605 565C543 625 450 650 323 650H43ZM213 547C213 587 217 598 226 604C236 612 262 617 304 617C371 617 429 604 474 576C554 529 592 439 592 336C592 176 505 36 319 36C246 36 213 55 213 131V547Z" id="g190-69"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="735" vert-adv-y="735"></glyph.data></g></svg> (V)</td><td align="center">772</td><td align="center">590</td><td align="center">24%</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Comparison of reference NLDMOS and this work.

Advances in Condensed Matter Physics

tab3

Table 3

Table 3: The Investigation of Field Plate Design in 500 V High Voltage NLDMOS 