Research Article

Determination of Temperature-Dependent Stress State in Thin AlGaN Layer of AlGaN/GaN HEMT Heterostructures by Near-Resonant Raman Scattering

Figure 3

(a) Raman shift of A1(LO) mode of AlGaN as a function of temperature together with the contribution of thermal expansion of lattice and phonon decay effects. (b) Temperature-dependent stress in AlGaN and its contribution to the Raman shift.
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(b)