Ni-Based Ohmic Contacts to n-Type 4H-SiC: The Formation Mechanism and Thermal Stability

Figure 15

Current-voltage characteristics for the Au/Ni₂Si/n-SiC (a, b) and Au/Ta₃₅Si₁₅N₅₀/Ni₂Si/n-SiC (c, d) ohmic contacts versus heat treatments.

(a)

(b)

(c)

(d)