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Advances in Condensed Matter Physics
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Advances in Condensed Matter Physics
/
2016
/
Article
/
Fig 16
/
Research Article
Ni-Based Ohmic Contacts to
n
-Type 4H-SiC: The Formation Mechanism and Thermal Stability
Figure 16
XRD spectra of the Au/Ni
2
Si/
n
-SiC (a) and Au/Ta
35
Si
15
N
50
/Ni
2
Si/
n
-SiC (b) ohmic contacts before and after heat treatments.
(a)
(b)