Ni-Based Ohmic Contacts to n-Type 4H-SiC: The Formation Mechanism and Thermal Stability

Figure 17

RBS spectra of the Au/Ni₂Si/n-SiC (a) and Au/Ta₃₅Si₁₅N₅₀/Ni₂Si/n-SiC (b) ohmic contacts before and after heat treatments. By an arrow are marked the surface energies of the respective elements.

(a)

(b)