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Advances in Condensed Matter Physics
Volume 2017, Article ID 4296243, 5 pages
Research Article

Microstructure and Magnetic Properties of NdFeB Films through Nd Surface Diffusion Process

School of Materials Science and Engineering, Institute of Advanced Materials, Taiyuan University of Science and Technology, Taiyuan 030024, China

Correspondence should be addressed to Mingang Zhang; moc.361@gnahzgm

Received 4 October 2016; Revised 5 December 2016; Accepted 19 December 2016; Published 18 January 2017

Academic Editor: Jingsheng Chen

Copyright © 2017 Wenfeng Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Ta/Nd/NdFeB/Nd/Ta films were deposited by magnetron sputtering on Si (100) substrates and subsequently annealed for 30 min at 923 K in vacuum. It was found that the microstructure and magnetic properties of Ta/Nd/NdFeB/Nd/Ta films strongly depend on the NdFeB layer thickness. With NdFeB layer thickness increasing, both the grain size and the strain firstly reduce and then increase. When NdFeB layer thickness is 750 nm, the strain reaches the minimum value. Meanwhile, both the in-plane and perpendicular coercivities firstly drastically increase and then slowly decrease with NdFeB layer thickness increasing. The highest in-plane and perpendicular coercivities can be obtained at NdFeB layer thickness of 750 nm, which are 21.2 kOe and 19.5 kOe, respectively. In addition, the high remanence ratio (remanent magnetization/saturation magnetization) of 0.87 can also be achieved in Ta/Nd/NdFeB (750 nm)/Nd/Ta film.