Effects of Deposition Temperature on Structural, Optical Properties and Laser Damage of LaTiO₃ Thin Films

Table 1

Content of elements in the films prepared at different deposition temperature.

Deposition temperature	At (%)
	C1s	La3d	O1s	Ti2p	(La3d + Ti2p): O1s
50	6.01	22.42	58.29	13.28	0.6125
75	5.79	22.27	58.82	13.12	0.6017
100	4.32	22.61	59.85	13.22	0.5987
125	4.58	22.87	59.36	13.19	0.6075
150	2.46	23.30	60.74	13.50	0.6059
175	2.98	23.53	60.00	13.49	0.6170
200	3.65	23.83	58.88	13.64	0.6364