Advances in Condensed Matter Physics / 2018 / Article / Fig 11

Research Article

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Figure 11

The dielectric functions of Al2O3 films with different thickness samples by the T-L model: real part (a) and imaginary part (b).
(a)
(b)