Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition

Figure 3

AFM micrographs of deposited Al₂O₃ films with different thicknesses. (a) 100 cycles. (b) 200 cycles. (c) 300 cycles. (d) 400 cycles. (e) 500 cycles. (f) Trend chart of roughness for the five samples. RMS represents root mean square roughness.

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