Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition

<div>Spectroscopic ellipsometer schematic of Al<sub>2</sub>O<sub>3</sub> film micronanosystem.</div>

Advances in Condensed Matter Physics

Figure 4: Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition 