Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition

<div>Al<sub>2</sub>O<sub>3</sub> films ellipsometry spectra of fit data (continued curves) and measured data (gauge points).</div>

Advances in Condensed Matter Physics

Figure 5: Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition 