Advances in Condensed Matter Physics / 2018 / Article / Fig 6

Research Article

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Figure 6

Trend chart of thickness for the five different cycle samples. The inset is SEM image of 1000 cycles ALD-Al2O3 film, where and represent film thickness and number of ALD cycles, respectively.