Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition

<div>Trend chart of thickness for the five different cycle samples. The inset is SEM image of 1000 cycles ALD-Al<sub>2</sub>O<sub>3</sub> film, where <svg height="9.49473pt" id="M52" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 7.34169 9.49473" width="7.34169pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M530 686C535 705 530 712 521 712C504 712 448 684 359 674L358 648H393C437 648 439 646 429 593L400 435C372 447 345 448 332 448C286 448 194 414 144 373C68 311 23 203 23 111C23 26 57 -12 91 -12C120 -12 147 3 188 29C227 54 290 102 341 170H343L322 71C308 6 320 -12 341 -12C373 -12 442 27 501 96L485 120C455 91 422 67 408 67C401 67 401 76 404 91C440 294 479 473 530 686ZM387 375L355 241C326 187 200 53 142 53C126 53 109 73 109 130C109 217 154 337 218 381C240 396 265 404 297 404S372 390 387 375Z" id="g113-101"></path></g></svg> and <svg height="9.25202pt" id="M53" style="vertical-align:-3.29111pt" version="1.1" viewbox="-0.0498162 -5.96091 10.8371 9.25202" width="10.8371pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M495 86L479 114C446 82 419 66 409 66C401 66 401 72 406 97C420 166 436 231 453 297C489 435 454 448 428 448C406 448 384 439 354 422C305 394 222 327 161 247H159L183 345C200 415 194 448 173 448C143 448 82 410 23 351L38 325C64 349 95 371 105 371C111 371 116 365 109 336L25 -4L31 -12C50 -4 77 3 107 9C119 69 132 122 145 168C197 254 321 381 370 381C387 381 393 374 378 305L329 95C309 17 320 -12 345 -12C372 -12 430 19 495 86Z" id="g113-111"></path></g><g transform="matrix(.0091,0,0,-0.0091,6.461,3.132)"><path d="M387 400C387 425 348 451 303 451C247 451 176 414 132 376C69 322 24 228 24 148C24 43 74 -12 147 -12C211 -12 301 33 363 103L346 128C319 99 249 51 193 51C148 51 112 84 112 165C112 230 130 287 154 330C170 359 199 400 243 400C277 400 304 383 326 354C333 345 343 343 354 348C378 360 387 382 387 400Z" id="g50-100"></path></g></svg> represent film thickness and number of ALD cycles, respectively.</div>

Advances in Condensed Matter Physics

fig6

Figure 6

Figure 6: Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition 

Advances in Condensed Matter Physics

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Figure 6

Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition