Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition

<div>The optical band gap changes with the ALD cycles.</div>

Advances in Condensed Matter Physics

Figure 8: Structural and Optical Properties of Amorphous Al<sub>2</sub>O<sub>3</sub> Thin Film Deposited by Atomic Layer Deposition 