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Advances in Condensed Matter Physics
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Advances in Condensed Matter Physics
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2018
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Article
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Fig 7
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Research Article
Research on a Micro-Nano Si/SiGe/Si Double Heterojunction Electro-Optic Modulation Structure
Figure 7
(a) Schematic diagram of device, (b) LSCM of device, (c) SEM of micro-ring structure, and (d) SEM of device.
(a)
(b)
(c)
(d)